Dielectric highly reflective mirror coatings for quantum cascade lasers with 4 – 5 μm emission wavelength

K. A. Podgaetskii, A. V. Lobintsov, A. I. Danilov, A. V. Ivanov, M. A. Ladugin, A. A. Marmalyuk, V. V. Dyudelev, D. A. Mikhailov, D. V. Chistyakov, A. V. Babichev, G. M. Savchenko, A. V. Lyutetskiy, S. O. Slipchenko, N. A. Pikhtin, A. G. Gladyshev, I. I. Novikov, L. Ya. Karachinsky, A. Yu. Egorov, G. S. Sokolovskii

Polyus Research and Development Institute named after M. F. Stel’makh, Moscow
National Engineering Physics Institute “MEPhI”, Moscow
Peoples’ Friendship University of Russia, Moscow
Ioffe Institute, St. Petersburg
Connector Optics LLC, St. Petersburg
St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg

Abstract: The calculation of dielectric mirrors for quantum cascade lasers in the mid-IR range was carried out. Optimal dielectric materials were selected to minimize the absorption of laser radiation. Samples of quantum cascade lasers emitting within the spectral range of 4 – 5 μm with various dielectric highly reflective mirror coatings were made and their characteristics were studied. It was shown that the deposition of highly reflective Si – Si₃N₄ coating on the rear face of the resonator led to the increase in the output optical power of the lasers under study by 71% as compared to the control samples without coatings. The use of Si – SiO₂ coating made it possible to increase the output power of the emitters by 88%.

Keywords: quantum cascade laser, highly reflective mirrors, output power, infrared range.

Received: 01.03.2023